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Local Scrubber

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Country:

Taiwan

Model No:

CHA-600

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(Negotiable) Get Latest Price

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IPI Integrated Plasma Inc.

Taiwan

Free Member

Contact Person CM

Ming-Syong, Chia-Yi, Other

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Product Specification

Brand Name: IPI

Dimensions(mm)::1100W * 1100D * 1850H
Weight(kg)::600
Capacity (LPM)::250

Product Description

IPI臺禹領先開發NH3觸媒Scrubber是光電產業唯一選擇:選定NH3觸煤或NH3觸媒+餘氫發電之理由
Relatively lower operation cost
Simple operation and easy maintenance(Simple change heater & catalyst)
SEMI-S2 certified
Good efficiency for SF6, C2F6, NF3, CF4, C3F8 ,C4F8,B2H6,NH3,PH3, AsH3,O3
NH3 decomposition and detoxifying equipment is primarily intended for treatment of waste gas from the GaN manufacturing process.
*3.An effective combination of ordinary-temperature dry detoxification and catalyst decomposition based-detoxification ensures lower running costs, easier maintenance and less environmental impact.
Detoxifying equipment is designed to decompose NH3 by means of a catalyst into nitrogen and hydrogen, thereby achieving full detoxification.
Causes no NOx emission which can be the byproduct of NH3 detoxification by oxidization.
Because it is not a burner type (combustion type), there is no need for propane supply equipment and drainage system. (However, A*0 uses a water-cooled decomposition column.)
Ensures that the target harmful gases in the detoxified gas are removed in concentration.
The adsorption and regeneration type does not require replacement of the after-treatment column detoxifying agent, yielding lower running costs.
Type: Heat-Catalyst-Wet TYPE
High abatement efficiency for PFC gases
No toxic by-products (NOx, SOx)
Excellent safety interlock system.Safety interlocks including flow, temperature,pressure,and leak sensors.
Pre-heated functionality for drain in gases to enhance the processing efficiency.
Special cooling design to prevent powder from accumulation.
High anti-corrosion design.

Country:	Taiwan
Model No:	CHA-600
FOB Price:	(Negotiable) Get Latest Price
Place of Origin:	-
Price for Minimum Order:	-
Minimum Order Quantity:	-
Packaging Detail:	-
Delivery Time:	-
Supplying Ability:	-
Payment Type:	-
Product Group :	-